Metrology

Group Delay Dispersion Measurement Device

• 940–1090 nm range
• 0° & 45° AOI
• Wavelength resolution 0.5 nm
• Measurement uncertainty ± 20 fs²

Tunable Laser-based Spectrophotometer

• 1000–1100 & 1270–1340 nm range
• Transmission 0°–70° AOI, Reflection 7.5° and 45° AOI
• Spectral resolution 0.1 nm
• Angular resolution ±0.5°

Gradient Reflectivity Mirror Measurement Apparatus

• High resolution camera 400–1100 nm
• Selected laser illumination wavelengths
• lateral resolution of reflectance profile as fine as 10 microns
• 5 mm to 4” diameter aperture

Spectrophotometers: UV, VIS, NIR, IR

• Cary 500 and 6000i and 7000, Perkin Elmer PE983G
• Transmittance and reflectance at variable angles
• Polarized measurements
• Step-scan apertures up to 18” in diameter for evaluating uniformity

Laser Photometer

• Reflectance & transmittance at 532 nm, 632.8 nm, 780 nm, 795 nm, 830 nm, 870 nm, 980 nm, 1030 nm, 1047 nm, 1064nm, 1270-1340 nm, 1315 nm, 1319 nm, 1550 nm
• Size range: up to 18” diameter
• Angle ranges: Ts,p @ 0°–80° & Rs,p @ 7.5°–80°

Cavity Ringdown Lossmeters

• Total loss measurements at 1064 nm & 1310 nm
• Sensitivity <1ppm loss on substrates and coatings

Absorptometer

• PCI-03 Photothermal Common-Path Interferometer
• Measurements at 532 nm, 780 nm, 1064 nm and 1319 nm
• Absorption sensitivity <1 ppm at 1064 nm

Phase Shifting Interferometers

• Apertures up to 150 mm at 632.8 nm
• Apertures up to 300 mm at 1064 nm and 1319 nm
• 6” and 12” Perfect Wave Reference Flats (<0.75nm RMS)

Microscope Inspection

• Bright Field / Dark Field / Stereo
• Nomarski Interference Contrast

Surface Profilers

• Zygo Model 5500 Optical Heterodyne Profiler (0.1Å RMS Sensitivity)
• Zygo NewView 5000 3D Optical Surface Profiler (2Å RMS Sensitivity)