Metrology

Group Delay Dispersion Measurement Device

  • 940–1090 nm range
  • 0° & 45° AOI
  • Wavelength resolution 0.5 nm
  • Measurement uncertainty ± 20 fs2

Tunable Laser-based Spectrophotometer

  • 1000–1100 & 1270–1340 nm range
  • Transmission 0°–70° AOI, Reflection 7.5° and 45° AOI
  • Spectral resolution 0.1 nm
  • Angular resolution ±0.5°

Gradient Reflectivity Mirror Measurement Apparatus

  • High resolution camera 400–1100 nm
  • Selected laser illumination wavelengths
  • lateral resolution of reflectance profile as fine as 10 microns
  • 5 mm to 4” diameter aperture

Spectrophotometers: UV, VIS, NIR, IR

  • Cary 500 and 6000i, Hitachi U-3410, Perkin Elmer PE983G
  • Transmittance and reflectance at variable angles
  • Polarized measurements
  • Step-scan apertures up to 18” in diameter for evaluating uniformity

Laser Photometer

  • Reflectance & transmittance at 532 nm, 632.8 nm, 780 nm, 795 nm, 830 nm, 980 nm, 1030 nm, 1047 nm, 1064nm, 1270-1340 nm, 1315 nm, 1319 nm, 1550 nm
  • Size range: up to 18” diameter
  • Angle ranges: Ts,p @ 0°–80° & Rs,p @ 7.5°–80°

Cavity Ringdown Lossmeters

  • Total loss measurements at 1064 nm & 1310 nm
  • Sensitivity <1ppm loss on substrates and coatings

Absorptometer

  • PCI-03 Photothermal Common-Path Interferometer
  • Measurements at 780 nm, 1064 nm and 1319 nm
  • Absorption sensitivity <1 ppm at 1064 nm

Phase Shifting Interferometers

  • Apertures up to 150 mm at 632.8 nm
  • Apertures up to 300 mm at 1064 nm and 1319 nm
  • 6” and 12” Perfect Wave Reference Flats (<0.75nm RMS)

Microscope Inspection

  • Bright Field / Dark Field / Stereo
  • Nomarski Interference Contrast

Surface Profilers

  • Zygo Model 5500 Optical Heterodyne Profiler (0.1Å RMS Sensitivity)
  • Zygo NewView 5000 3D Optical Surface Profiler (2Å RMS Sensitivity)